Design and Simulation of MEMS Based Surface Acoustic Wave Sensor using COMSOL Multiphysics
نویسندگان
چکیده
منابع مشابه
Sensitivity Analysis of MEMS Based Piezoresistive Sensor Using COMSOL Multiphysics
The present paper peruses MEMS based piezoresistive pressure sensor and its fabrication techniques. Simulation of the pressure sensor is done by using COMSOL Multiphysics software for P-type silicon piezoresistor. The deflection of N-type silicon diaphragm depends upon the Young’s modulus of the material and varies with the amount of force applied to the diaphragm. The simulation result emphasi...
متن کاملDesign of MEMS Based Elecrostatically Controlled Micromirror Using COMSOL Multiphysics
In this paper, we have addressed the Design and simulation results of an electrostatically controlled micro mirror using COMSOL multiphysics Software. The structural mechanical properties of the actuation mechanism of a square shape micro-mirror with the lift-off of the structure used four springs simulating a prestressed cantilever beam. There are few base materials were introduced like Alumin...
متن کاملAdvanced Applications of an Automated Generative Tool for MEMS Design Based on COMSOL Multiphysics
This work presents a different use of COMSOL, not only as a simulation platform for engineering tasks, but also as an integrated component of a computational AI tool framework used to automate designs creation. CNS-Burst is a computational synthesis method used to create solutions to an assigned design task. This search method, iteratively applied, finds design alternatives and represents them ...
متن کاملDesign of Mems Based Tristate Phase Shifter Using COMSOL 4.3b
A V-band CMOS-MEMS switchable phase shifter based on reflection-type topology is presented in this work. Phase shifter is simulated by using CMOS process. Three discrete phase states are achieved at 65GHz by using Bi-directional fishbone actuators. The measured insertion is very less and the return loss is also better than 14 dB over the 55-65GHz frequency range. It demonstrates a great potenti...
متن کاملSimulation of Geomechanical Behavior during SAGD Process using COMSOL Multiphysics®
Steam-Assistant-Gravity-Drainage (SAGD) has become one of the most commonly used thermal recovery processes to extract heavy oil from oil sand reservoirs, especially in Northern Alberta, Canada. However, due to geological history, interbedded shales (IBS) in the reservoir act as barriers due to their low permeability and as such hinder the progression of the steam chamber. Cap-rock integrity al...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Chemical and Pharmaceutical Sciences
سال: 2018
ISSN: 0974-2115,2349-8552
DOI: 10.30558/jchps.20181101025